多層膜反射フィルターは、特定のVUV~UV波長で高い反射率を実現し、より長波長のUV~IR光を透過させる全誘電体反射フィルターです。45°AOIで設計されています。
ピーク波長250 nm以上のカスタムUVフィルターは、〜210 nm以下のDUV-VUV透過率で利用可能です。
VUV / UV反射フィルター Acton標準フィルター 45°AOI
波長 | ピーク反射率 | 1.0インチ | 1.5インチ | 2.0インチ |
---|---|---|---|---|
126nm | ≥40% | M126-3045-1D | M126-3045-1.5D | M126-3045-2D |
146nm | ≥45% | M146-3045-1D | M146-3045-1.5D | M146-3045-2D |
157nm | ≥82% | M157-3045-1D | M157-3045-1.5D | M157-3045-2D |
172nm | ≥82% | M172-3045-1D | M172-3045-1.5D | M172-3045-2D |
185nm | ≥82% | M185-3045-1D | M185-3045-1.5D | M185-3045-2D |
193nm | ≥82% | M193-3045-1D | M193-3045-1.5D | M193-3045-2D |
200nm | ≥90% | M200-3045-1D | M200-3045-1.5D | M200-3045-2D |
208nm | ≥90% | M208-3045-1D | M208-3045-1.5D | M208-3045-2D |
212nm | ≥90% | M212-3045-1D | M212-3045-1.5D | M212-3045-2D |
220nm | ≥90% | M220-3045-1D | M220-3045-1.5D | M220-3045-2D |
240nm | ≥90% | M240-3045-1D | M240-3045-1.5D | M240-3045-2D |
248nm | ≥90% | M248-3045-1D | M248-3045-1.5D | M248-3045-2D |
254nm | ≥90% | M254-3045-1D | M254-3045-1.5D | M254-3045-2D |
260nm | ≥90% | M260-3045-1D | M260-3045-1.5D | M260-3045-2D |
266nm | ≥90% | M266-3045-1D | M266-3045-1.5D | M266-3045-2D |
280nm | ≥90% | M280-3045-1D | M280-3045-1.5D | M280-3045-2D |
300nm | ≥90% | M300-3045-1D | M300-3045-1.5D | M300-3045-2D |
320nm | ≥90% | M320-3045-1D | M320-3045-1.5D | M320-3045-2D |
340nm | ≥90% | M340-3045-1D | M340-3045-1.5D | M340-3045-2D |
352nm | ≥90% | M352-3045-1D | M352-3045-1.5D | M352-3045-2D |
360nm | ≥90% | M360-3045-1D | M360-3045-1.5D | M360-3045-2D |
注:175nm以下のフィルター基板材料CaF2 175nmより長波長は溶融シリカ